Nanostructures Laboratory, Princeton University，USA

报告摘要: The talk will present recent advances in nanoimprint lithography (NIL) made at Princeton NanoStructure Lab as well as commercialization at Nanonex Corp. Particularly, the talk will address (a) 6 nm half-pitch, sub-3 nm pattern transfer fidelity, large pattern printing areas (over 50 in-sq), sub-20 nm alignment, 3D shape patterning, NIL materials and NIL masks, (b) NIL applications in different disciplines, such as nanoscale electronics (nano-MOSFETs and SRAMs), photonics, displays, data storage (bit-patterned media – also called quantized magnetic disks [2]), biotech, chemical synthesis and advanced materials, and (c) commercialization of NIL technologies at Nanonex, which is a NIL solution company who has provided NIL tools, resists, masks, and processes  to over hundred customers.

报告人简介：Stephen Y. Chou, Joseph C. Elgin Professor of Engineering and the head of the NanoStructure Laboratory at Princeton University, is a world leader, pioneer, and inventor in a broad range of nanotechnologies. Dr. Chou received his PhD from MIT in 1986. He was a Research Associate and Acting Assistant Professor at Stanford University (1986--1989), and a faculty member at the University of Minnesota (1989-1991, Assistant Prof, 1991-1994, Associate Prof, and 1994-1997 Full Prof), and joined Princeton University in 1998.
Dr. Chou was elected to the National Academy of Engineering (美国工程院院士) in 2007 and received the 2004 IEEE Brunetti Award for the invention and development of tools for nanoscale patterning, especially nanoimprint lithography, and for the scaling of devices into new physical regimes. Dr. Chou has published more than 280 papers, has given over 100 invited presentations at conferences and workshops, and holds 15 patents and over 40 patent applications.

联系人：2009年中关村论坛主持人 曹则贤研究员（82649136）